Cyantek offers high
purity solvents and solvent blends for the E-Beam processes.
The following is a list of the developer and rinse products
for the PBS and ZEP-7000 resists:
I. PBS Developers:
Product
% MIAK
% MPK
DP-12
100
--------
DP-13
80
20
DP-14
70
30
I. PBS Rinses:
Product
% IPA
% Hexanol
% MIAK
RP-10
60
--------
40
RP-33
--------
60
40
III. Developers & Rinses for the ZEP-7000 Resist:
Product
Application Method
DP- 50 Developer
Spray
DP- 60 Developer
Puddle
RP- 21 Rinse
Spray or Puddle
In addition to the above products, we welcome product inquiries for other positive
and negative e-beam resists.
